Department of Physics

Facilities

200 m2 clean room

• RAITH e-Tool e-beam writer
• LEO SEM
• Oxford PlasmaLab 80 RIE & CVD
• UHV and HV e-beam evaporators
• Basic microfabrication facilities
Directly pumped 4He cryostat.
Base temperature ~ 1K and
stability ~ 0.1 mK.
Oxford Instrument Kelvinox-400 4He3He refrigerator.
Base temperature ~ 7mK, magnetic field up to 8 T.