22.01.2018

Cleanroom nanofabrication facility

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The nanofabrication cleanroom is a shared facility, where state-of-the-art nanofabrication can be performed in a controlled ISO 5 clean room environment. Wide range of multidisciplinary research conducted at NSC is based on structures and devices fabricated in the facility, down to length scales of 10 nm. Device fabrication can be based on UV-photolithography, advanced electron-beam lithography, direct 3D laser writing, and ion beam lithography and milling.  A wide variety of techniques exist for material deposition and etching, such as evaporation, atomic layer deposition, pulsed laser deposition and reactive ion etching. Sub-nanometer scale imaging is available using helium ion microscopy or scanning electron microscopy. Outside the cleanroom, advanced atomic force microscopy and transmission electron microscopy are also available.

Using our facilities

External users are welcome in our nanofab facility. Wide range of services are offered, from contract-based research with companies to scientific collaboration, where our well-trained experts do the fabrication work.