LIBS setup

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Laser-Induced Breakdown Spectroscopy (LIBS) setup

Name and Model (Year of Manufacture / Installation)
  • Self-made setup
  • Parts:

Optex 193 nm (ArF) (1999/1999)

Optex 248 nm (KrF) (2000/2000)

Optex Nd:YAG (2006/2006)

& other instruments

General Information

Laser-induced Breakdown Spectroscopy (LIBS) setup. The setup contains laser devices, spectrometers and other instruments.

The setup consists of the following lasers:

  • An argon fluoride (ArF) excimer (or exciplex) laser device; ultraviolet laser.
  • Neodymium-doped yttrium aluminium garnet (Nd: YAG) solid-state laser device.
  • A krypton fluoride (KrF) excimer (or exciplex) laser device; ultraviolet laser.
Key Specifications        

(ArF): Wavelength: 193 nm

(KrF): Wavelength: 248 nm

(Nd: YAG): Wavelength: 1064 nm

Depth resolution: 1 μm per pulse

2 detectors:

  • Echelle spectrometer: Mechelle spectral system 7500 (Echelle grating), Multichannel Instruments, ICCD,  DiCAM-PRO, PCO 
  • Czerny-Turner spectrometer: SP-150. Acton Research Corp. ICCD, Instaspec V, Oriel + Delay generator, model DG 535, Stanford Research System, Inc.
Key Features

All laser devices can be used independently for various purposes outside of this setup.

Location, Responsible Person

Nanoscience Center / Pasi Myllyperkiö


Contact person at the Department of Chemistry also:

Saara Kaski (room YF 410), phone: +358 40 805 3691