Carbolite CTF/12/65/550

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Carbolite CTF/12/65/550 tube furnace


Name and Model (Year of Manufacture / Installation)

CTF/12/65/550 (1996/1996)

 General Information

CTF wire wound single zone tube furnace. Used mainly for Si oxidation.

Key Specifications        
  • Overall Dimensions (D x H x W): 360 x 525 x 625 mm
  • Maximum temperature: 1200 °C
  • Maximum continuous operating temperature: 1100 °C
  • Heat-up time: 45 minutes
  • Heating tube inner diameter: 65 mm
  • Heating zone length: 550 mm
Key Features
  • Gases available for the process: O2, Ar, N2
  • Ceramic heating tube; integral wire wound working tube
  • Overtemperature protection
  • Delayed start/process timer function
  • Ramp rate and heating/cooling in steps can be programmed to go automatically or all can be done manually.
Location, Responsible Person

 Nanoscience Center, cleanroom / Kimmo Kinnunen

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