UHV evaporator

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Name and Model (Year of Manufacture/Installation)
Ultra High Vacuum (UHV) evaporator supplied by Instrumentti Mattila (-98/-98)

System includes:
  • E-gun, Telemark TT 10
  • Cyopump, Cryo-torr 8
  • Ion Gun, Tectra IonEtch GenII
General Information
Growth of metal films.
UHV system is used when especially pure films are needed. Magnetic or insulating materials are not allowed.
Key Specifications        

Key Features
Materials evaporated:
  • Au, Ag, Ti, Nb, Ta, Cu, Al, Bi, V, Ge, Pt, Sn, Pd, Mo, Si
  • 6 materials per time

Location, Responsible Person
NSC clean room, Tarmo Suppula / Antti Nuottajärvi

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