24.08.2016

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### Xradia NanoXCT-100 X-ray Nanotomography device

Name and Model (Year of Manufacture / Installation)

General Information

Nanotomography is a non-destructive 3D X-ray imaging method to scan internal structure of the sample material. NanoXCT-100 is an ultra-high resolution 3D CT scanner for 3D visualization of microscopic samples. It uses zone plate and capillary based X-ray optics to produce images at a resolution as fine as 50 nm and depth of focus up to 65 microns. The method enables observation of the material in its natural state.

Key Specifications

Sample stage

Travel: X-axis: 15 mm, Y-axis: 10 mm, Z-axis: 15 mm, Rotation: ±180°

Source

Voltage: 20 kV (min)…40 kV (max)

Max power: 1,2 kW

X-Ray Photon energy: 8 keV

Nominal specifications of the system (given by the manufacturer)

 Spatial resolution* Field of View Radiation safety 150 nm 60 µm <1 µS / hr 50 nm 15 µm <1 µS / hr

* Resolution according the manufacturer’s resolution test pattern.

Key Features
• Produces 3D X-ray CT images at a resolution as fine as 50 nm, depth of focus up to 65 microns
• Zone plate and capillary based X-ray optics
• Switchable field-of-view ranging from 15 to 60 µm
• X-POSE technology employing Zernike phase contrast imaging. The phase contrast mode Zernike is developed by Xradia.
• Operating with 8 keV X-rays, the nanoXCT-100 enables observation of structures and materials in their natural state.
• System comes with an optical microscope, called the pre-alignment microscope (PAM) which helps the user to locate the region-of-interest. Two objective lenses are available with 10X and 50X magnification, as well as transmission and reflection illumination modes.
• Transmission detector system (TDS) consists of two different magnifying, scintillating lenses (2X magnification for alignment and 20X for imaging). These lenses convert the x-ray photons to the visible-light spectrum, and are then focused by a non-magnifying tubelens onto the 16-bit, Peltier-cooled CCD detector.
• Flight tube: normal air, consisting primarily of N gas, is significantly absorbent of 8 keV photons. At 8 keV over the distance between the optics and detector, this can lead to as much as a factor of 2 throughput loss. To minimize this effect, a flight tube is installed to cover the majority of the path length, which is filled with ~ 3 PSI of He gas. The gas is sealed by a thin Be window at the entrance, which is very fragile and should be left alone.
• X-ray source: The nanoXCT laboratory tool uses a rotating anode x-ray source with copper (8 keV) target material.

Applications:

• Porous media: input data for porespace microstructure and flow modeling.
• Composite materials: characterization of features such as porosity, cracks, and phase distribution.
• Semiconductor and MEMs: defect investigation and failure analysis of interconnects.
Location, Responsible Person

Dpt. of Physics, Cleanroom FL144B / Joni Parkkonen